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    Nanjing ChiShun Tech Dev Co., Ltd
    Location:Products > Furnace > CVD Tube Furnace
    Name: TF1700 CVD Tube Furnace
    Model: TF1700
    Introduction: 1700°C Tube Furnace Chemical Vapor Deposition (CVD) refers to the method of chemical gas or steam reacting on the surface of the substrate to synthesize coatings or
    nanomaterials. 
    1700℃CVD Tube Furnace
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    1700°C Tube Furnace Chemical Vapor Deposition (CVD) refers to the method of chemical gas or steam reacting on the surface of the substrate to synthesize coatings or
    nanomaterials. It is the most widely used technology in the semiconductor industry to deposit a variety of materials, including a wide range of insulating materials,

    most metallic materials and metal alloy materials.


    Furnace shell

    The shell is made of metal Q235 low-carbon steel, and the surface is electrostatically resistant and resistant to corrosion.

    The solid double-layer metal frame is combined with the heat-insulating fan structure, and the furnace surface temperature is low

    Horizontal use mode, upper opening structure, easy to operate

     

    Refractory material

    Multi-layer insulation design, composed of lightweight alumina ceramic fiber and high-quality insulation board backing, does not contain asbestos components, low heat loss and low energy consumption

     

    Heating system

    High-quality MoSi2 spiral resistance wire heating element is safely and firmly embedded on the surface of the furnace, and is heated by free heat radiation in the furnace cavity, which is energy-saving and efficient, and has a long service life

    Ring heating by resistance wire to achieve good uniformity in the furnace

     

    Temperature Control Panel

    PID and SSR control mode, precise temperature control

    Internationally standardized B-type nickel-chromium-silicon thermocouple with a temperature measurement range of 0-1600℃ and a long service life

    The furnace door is equipped with a door-opening power-off safety protection switch

     

    Program Controller

    Advanced controllers that meet complex process requirements

    Simple and direct operation, flexible programming

    Programmable 4 curves, 8 program segments for a single curve

    Over temperature and fault alarm, automatic safety protection

     

    Vacuum Atmosphere Function

    With 304 stainless steel sealing flange to obtain vacuum or atmosphere in the furnace tube

    High-quality quartz glass working tube, and metal or corundum working tube can also be selected to adapt to different working conditions

    The high-performance bipolar rotary vane vacuum pump can obtain a vacuum degree of 5pa, and the digital vacuum gauge can display the vacuum degree

    With air circuit control unit, the control unit can choose 1-3 way MFC automatic control system


    Specifications

    Model

    TF1700-25

    TF1700-40

    TF1700-60

    TF1700-80

    TF1700-100

    TF1700-120

    Tube Size

    Φ25x800mm

    Φ40x1000mm

    Φ60x1000mm

    Φ80x1000mm

    Φ100x1000mm

    Φ120x1000mm

    Max Temperature

    1700

    Work Temperature

    1600

    Heating Zone

    300mm

    Voltage/Power

    220V/3KW

    220V/3KW

    220V/4KW

    220V/5KW

    220V/5KW

    220V/5KW

    Heating Element

    Molybdenum Disilicide( MoSi2)Heater

    Chamber Material

    Polycrystalline inorganic alumina ceramic fiber material prepared by wet vacuum filtration

    Tube Material

    Alumina Tube

    Temperature Accuracy

    ±1

    Thermocouple

    B type thermocuple

    Temperature Controller

    Intelligent microcomputer PID temperature control instrument, SCR/SSR control, PID parameter self-tuning function; programmable 4 groups of 8 program segments, program heating, program heat preservation, program cooling

    Heating Rate

    1-25/min freely set

    Furnace Structure

    Furnace temperature control integrated structure, furnace opening and closing; double-layer shell, air circulation and heat insulation

    Sealing Function

    Both ends of the furnace tube are equipped with stainless steel metal flanges, matched with high-temperature PTFE gaskets, which can work under vacuum with a vacuum degree of ≤5pa (rotary vane vacuum pump)

    Atmosphere Performance

    There are air inlets and outlets at both ends of the flange. The pressure gauge is installed on the metal flange. The precision needle valve can adjust the air intake and output, and can be fed with protective gases such as nitrogen, argon, and hydrogen.

    Equipment Safety

    Modular control, sound and light alarm signal will be sent out for over temperature and broken coupler in the working process, and the protection action will be completed automatically

    Safety Protection

    The equipment is equipped with a circuit breaker, which will automatically pop open in case of short circuit leakage, which can protect the safety of equipment and operators

    Furnace Shell

    High-quality cold-rolled steel plate CNC machine tool blanking processing, after welding, grinding, polishing, phosphating, pickling, surface electrostatic spraying plastic powder

    Standard Accessroies

    1. Furnace Body  2. Temperature Controller 3. Power Cable 3 meters  4.Thermocouple  5.Manual  6. Furnace Hook 7. One pair of high temperature gloves 8. Two pipe plugs  9. One set of sealing flange

    Optional Accessories

    1. Optional rotary vane vacuum pump (vacuum degree ≤ 5pa  2. Optional digital vacuum gauge (1.0×105-1.0×10-1pa)  3. Optional float flowmeter (range 60-600ml/min)  4. Optional with quartz boat


    Disclaimer
    The content on this website (including product description, images, parameters, etc.) is for reference only and does not constitute a legal offer or commitment. We will keep updating and please be noted that some may not match the actual situation due to the delay.
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    +86 139 1299 5166

    • Email: chishun@126.com
    • Phone: +86 139 1299 5166
    • Address: NO.2 Ailing Road, Jiangning DisTrict, Nanjing
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